Technical Issues - Leybold Monitoring Report

FilmStar MONITOR includes three BASIC macros for managing Leybold SYRUSpro data transfer to OMS 4000 optical monitors:

SproMonitorReport.bas    Creates Leybold Monitoring Report (MONITOR)
SproExportNK.bas           Export n,k data (INDEX)
SproImportNK.bas           Import n,k data (INDEX)

These macros require Chilkat's free XML library (also available here). In MONITOR specify Setup.. Program Mode.. Leybold SYRUSpro.

In INDEX specify Functions.. User Defined.. Special.. Leybold SYRUSpro Mode. This adds an Insert SYRUSpro button which activates the dialog shown at the right. All indices, including substrate, are defined by .itw files (constants NG) and must be added in the Index Properties dialog.

While these may contain dispersive functions such as Cauchy or Sellmeier, MONITOR calculations require n,k vs. wavelength tables. Use Functions.. Create Table to create and add tables.

SiO2 dispersion specified by n,k table (SPNK)

TiO2 dispersion specified by Sellmeier 2 function (SPS2-0, no absorption)

Sellmeier 2 dispersion defined in Leybold Monitor Report
LMR specified as XML file type in

For SYRUSpro machines without optical monitor (or when the OMS is not used), a Monitoring Report (*.lmr) can be created with FilmStar DESIGN (XML library not required) macro SproCrystalReport.bas  found in ..\Winfilm\Basic32. The output of this macro is illustrated below.

Note the inclusion of nonsense blank or zero optical monitor data. These are ignored when data are further processed by Leybold program LayerCalc2Recipe into XML recipe files. It appears that layer materials (i.e. SiO2, TiO2) are not actually defined in the LMR file; instead, they are defined in the Reference Recipe in LayerCalc2Recipe.

Note that the Reference Recipe must have the same number of layers as the Monitoring Report. LayerCalc2Recipe is quite fussy about paths; you will probably copy the LMR file to

..\LayerCalc2Recipe\Leybold monitorinreport and dispersion specifications

After processing the LMR by LayerCalc2Recipe, the XML file shown above is generated. This is the information actually transferred to the machine. FTG responsibility is to create a valid Leybold Monitoring Report. Beyond that step, all other support will be provided by Leybold. If contacting your local Leybold representative fails to satisfy, try Detlef Arhilger (tel  +49 6023-500-557).

If you cannot find LayerCalc2Recipe.exe on your SYRUSpro computer hard drive, please contact Leybold for an update. It might be also be necessary to update other software on your machine. The process is exactly the same for machines with OMS 4000; in that case, however, much more data is transferred to the SYRUSpro.

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